Publikationen in 2017

Veröffentlichungen

Jamila Boudaden, Armin Klumpp, Hanns-Erik. Endres, Ignaz Eisele
Capacitive CO2 Sensor
Proceedings 2017,1(4), 472; doi:10.3390/proceedings1040472

Stephan Altmannshofer, Bastian Miller, Alexander W. Holleitner, Jamila Boudaden, Ignaz Eisele, Christoph Kutter
Deposition of micro crystalline silicon films using microwave plasma enhanced chemical vapor deposition
Volume 645, 1. Januar 2018, Pages 180-186; https://doi.org/10.1016/j.tsf.2017.10.031

Stephan Altmannshofer, Jamila Boudaden, Robert Wieland, Ignaz Eisele, Christoph Kutter
Microwave plasma assisted process for cleaning and deposition in future semiconductor technology
Global Conference on Polymer and Composite Materials 2017, IOP Conf. Series: Materials Science and Engineering (2017) 012021  doi:10.1088/1757-899X/213/1/012021

Paul D. Franzon, Eric J. Marinissen, Muhannad S. Bakir, Philip Garrou, Mitsumasa Koyanagi and Peter Ramm
Handbook of 3D Integration, Volume 4: Design, Test and Thermal Management
Wiley-VCH, ISBN: 978-3-527-33855-9, Dezember 2017

Pragoti Pran Bora, David Borggreve, Frank Vanselow, Erkan Isa, Linus Maurer
Low-Voltage Low-Distortion Sampling Switch Design in 22 nm FD-SOI CMOS Technology
ICECS2017, IEEE, Batumi, Georgien, 5.-8. Dezember 2017 

Peter Ramm, Josef Weber, Rolf Aschenbrenner, Michael Töpper
MEMS/IC-System Produktion mittels 3D- und Panel-Integration
VDI/VDE Regionalmagazin „Technik in Bayern“, Ausgabe 05/2017, S. 14-15

Johannes Weber, Wolfgang Reinprecht, Horst Gieser, Heinrich Wolf, Linus Maurer
Correlation Limits between Capacitively Coupled Transmission Line Pulsing (CC-TLP) and CDM for a Large Chip-on-Flex Assembly
EOS/ESD Symposium, Westin La Pal. Tucson, USA, 10.-15. September 2017

Johannes Weber, Karim T. Kaschani, Horst Gieser, Heinrich Wolf, Linus Maurer, Nicolai Famulok, Reinhard Moser, Krishna Rajagopal, Michael Sellmayer, Anmol Sharma, Heiko Tamm
Correlation study of different CDM testers and CC-TLP 
EOS/ESD Symposium, Westin La Pal. Tucson, USA, 10.-15. September 2017

Martin Peterlik, Josef Kölbl, Leonhard Sturm
Phase Noise Evaluation of a Novel Low-Noise Field Effect Transistor 
Applied Research Conference (ARC), München, 7. Juli 2017

Orsolya Lang, Laszlo Kőhidai, Joachim Wegener,
Label-free profiling of cell dynamics: A sequence of impedance-based assays to estimate tumor cell invasiveness in vitro
Experimental Cell Research, Juli 2017

M. Fernández-Bolaños, Wolfgang A. Vitale, Mariazel Maqueda López, Adrian M. Ionescu, Ilja Ocket, Walter De Raedt, Amin Enayati, Armin Klumpp, Reinhard Merkel, Josef Weber, Peter Ramm
3D TSV based high frequency components for RF IC and RF MEMS applications
IEEE Xplore, July 2017

Peter Ramm, Gilles Poupon, Pascal Courderc, Markus Leitgeb, Maaike M. Visser Taklo
The Advancement of Device Packaging – A Resume on IMAPS DPC 2017
Journal „Advancing Microelectronics“, Vol. 44 No. 3 (May/June 2017)

S. Altmannshofer, J. Boudaden, R. Wieland, I. Eisele and C. Kutter
Microwave plasma assisted process for cleaning and deposition in future semiconductor technology

2017 Global Conference on Polymer and Composite Materials (PCM 2017), Guangzhou, China, 23.-25. Mai, 2017 

Peter Ramm, Gilles Poupon, Pascal Courderc, Markus Leitgeb, Maaike M. Visser Taklo
The Advancement of Device Packaging – A Resume on IMAPS DPC 2017
3D InCites Ressource Library, Phoenix & San Francisco, USA, 17. April 2017

C. Jenke, J. Pallejà Rubio, S. Kibler, J. Häfner, M. Richter, C. Kutter
The Combination of Micro Diaphragm Pumps and Flow Sensors for Single Stroke Based Liquid Flow Control
Sensors 2017, 17, 755; doi:10.3390/s17040755, 3. April, 2017

M. Henfling, U. Gossner, C. Kutter, W. Hansch, S. Trupp
Simultaneous optical and electrical CO2 detection in one sensitive film
Sensors and Actuators B: Chemical, Volume 241, 31. März 2017, Pages 1256–1260

J. Boudaden
SMART HVAC SENSORS FOR SMART ENERGY
Smart Systems Integration Proceedings, 2017

Josef Weber, Peter Ramm
Super-Brains for the IoT Age
Fraunhofer VμE Microelectronics News, February 2017, p. 3

Akram El Hasni, Stefan Pfirrmann, Anett Kolander, Erwin Yacoub‑George, Martin König, Christof Landesberger, Anja Voigt, Gabi Grützner, Uwe Schnakenberg
Six-layer lamination of a new dry film negative-tone photoresist for fabricating complex 3D microfluidic devices
Microfluid Nanofluid, DOI 10.1007/s10404-017-1877-8, Springer-Verlag Berlin Heidelberg, 13. Februar 2017

Vorträge

Peter Ramm, Montserrat Fernández-Bolaños, Josef Weber
Low-Temperature 3D Integration Processes for Advanced Sensor Systems
Invited Talk, International Conference on Functional Integrated nano Systems nanoFIS, Graz, 22.-24. November 2017

Peter Ramm
Invited Talk: Si Technologies, Devices and 3D Integration at Fraunhofer EMFT
LETI Technical Seminar, Grenoble, France, 21.-22. November, 2017

Tekfouy Lim, Ekta Sharma, David Borggreve, Emmanuel Pistono, Sylvain Bourdel, Erkan Nevzat Isa, Frank Vanselow, Philippe Ferrari and Linus Maurer
3Slow-wave coplanar strip line based Low-power 80-GHz Voltage Control Oscillator on 22-nm FDSOI technology
IEEE Asia-Pacific Microwave Conference, Kuala Lumpur, Malaysia, 13.-16. November 2017

A. Ohlander, A. Seb, I. Bose, Th. Ganka, F. Wiest, C. Kutter
Dynamic fluorescence measurements on DMA microarrays in foil-based microfluidics using multichannel Silicon Photomultipliers
Mikrosystemtechnik Kongress 2017, München, Germany, 22. - 26. Oktober 2017

Anna Ohlander, Indranil Bose, Duncan Njenda, Ujjwal Neogi, Christoph Kutter and Aman Russom
Lab-on-foil Based Portable Micro-PCR for POC Nucleic Acid Testing of HIV-1
microTAS, Savannah, Georgia, USA, 22.-26. Oktober 2017

Jamila Boudaden
Functionalized nanoparticles for CO2 sensors
NANOSMAT Conference 2017 (Paris, France), 11.-13. September 2017, oral presentation

Jamila Boudaden
Capacitive CO2 sensor
Eurosensors Conference 2017 (Paris, France), 3.-6. September 2017, oral presentation

Axel Wille
The Role of Micro Diaphragm Pumps in Medical Technologies
IHK Lübeck, 4. Juli 2017

Joachim Wegener
Profiling the Pharmacology of GPCRs using Impedimetric Monitoring of Cell-Based Assays
Affinity 2017, Paris, Frankreich, 26. Juni 2017

Christof Landesberger
Hybrid integration of thin silicon devices on and in flexible film substrates
Printed Electronics Europe, Berlin, 10.-11. Mai 2017

Jamila Boudaden
Invited Talk: An approach to reduce greenhouse gases in the semiconductor industry using F2 for CVD chamber cleaning
1st International Materials Science and Engineering for Green Energy Conference, Ifran, Marokko, 10. - 12. Mai 2017

Joachim Wegener
Monitoring Living Cells with Physical Transducers
Fraunhofer IGB, Stuttgart, 24. April, 2017

Axel Wille
Entgasen von Flüssigkeiten in der Mikrofluidik
microTEC Südwest Clusterkonferenz, Freiburg, 27./28. März 2017

Axel Wille
Mikroentgaser - Gasförmiges dem Flüssigen entziehen
Fraunhofer EMFT Jahresveranstaltung, München, 15. März 2017

Jamila Boudaden
Smart  HVAC sensors for smart energy
Smart Systems Integration, International Conference and Exhibition on Integration issues of Miniaturized Systems, Cork, Irland, 8. - 9. März 2017

Indranil Ronnie Bose, Patrick Gest, Christof Landesberger, Christoph Kutter
Roll-to-Roll processed foil inlay as an electrostatic chuck for flexible thin semiconductor wafer handling
Smart Systems Integration, International Conference and Exhibition on Integration issues of Miniaturized Systems, Cork, Irland, 8. - 9. März 2017

Joachim Wegener
Profiling the Pharmacology of GPCRs using a Whole-Cell Biosensor
Batsheva de Rothschild Seminar on New Concepts in Biosensing 2017, Totes Meer (Israel), 13. Februar, 2017