3D-Foil assembly technology services [ PDF 0.41 MB ] Characterisation of gases [ PDF 0.2 MB ] Electrochemical transducer [ PDF 0.39 MB ] From ultra-thin silicon dies to flexible chip foil packages [ PDF 0.28 MB ] Heterogenous 3D integration [ PDF 0.41 MB ] HiCO2 – a long-term stable, highly sensitive CO2/humidity sensor [ PDF 0.5 MB ] MEMS microphone [ PDF 0.2 MB ] Micro diaphragm pumps portfolio [ PDF 0.36 MB ] Microdosage system with piezo driven micropumps [ PDF 0.3 MB ] Microdosing systems for medical technology [ PDF 0.36 MB ] Micro drug delivery system for tumor therapy (TuDOS) [ PDF 0.38 MB ] Micropump driver electronic [ PDF 0.17 MB ] Mobile electrostatic carrier [ PDF 0.24 MB ] Modular ESD-tester [ PDF 0.31 MB ] Sensor textiles for improved savety [ PDF 0.28 MB ] SMARTPUMP - Micropump for empowering sensors in mobile devices [ PDF 0.33 MB ] Services offering MEMS-technologies [ PDF 0.47 MB ] Stainless steel micropumps [ PDF 0.36 MB ] Wiring systems on plastic films [ PDF 0.38 MB ]
Annual report 2016 [ PDF 7.56 MB ] Annual report 2015 [ PDF 5.64 MB ] Annual report 2014 [ PDF 4.34 MB ] Annual report 2013 [ PDF 6.14 MB ] Annual report 2012 [ PDF 7.34 MB ] Annual report 2011 [ PDF 3.82 MB ]
Fraunhofer Research Institution for Microsystems and Solid State Technologies EMFT