Fraunhofer Research Institution for Microsystems and Solid State Technologies EMFT
- © Fraunhofer EMFT
Project of the month: e-carrier
In many areas microelectronic components must become smaller and flatter still. In the meantime the wafers have become so thin that for some applications handling techniques reach their limits. A Fraunhofer EMFT research team in Munich has developed an alternative: An electrostatic carrier stabilizes the wafer as if by magic.