Fraunhofer EMFT

Fraunhofer Research Institution for Microsystems and Solid State Technologies EMFT

© Fraunhofer EMFT

Project of the month: e-carrier

In many areas microelectronic components must become smaller and flatter still. In the meantime the wafers have become so thin that for some applications handling techniques reach their limits. A Fraunhofer EMFT research team in Munich has developed an alternative: An electrostatic carrier stabilizes the wafer as if by magic.


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