Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFTIn the QuQuSemi project, a Fraunhofer EMFT research team is working together with Quantum Diamonds and the Technical University of Munich on a high-resolution microscope based on diamond-based quantum sensors that is specially designed for analyzing semiconductor components. With a spatial resolution of just 100 nanometers at room temperature, it aims to enable the precise measurement of the smallest magnetic fields and temperature differences.
High Precision diamond microscope with quantum sensors
A scientist works on the quantum diamond microscope.
The project partners aim to develop an innovative, high-resolution microscope that is specially designed for analyzing semiconductor components and multichip modules with diamond-based quantum sensors. The focus is on the industrial requirements for resolution, field of view and speed. Possible applications range from the analysis of circuits and the identification and localization of faults to new types of non-destructive analyses for authenticity and security. Particularly exciting is the microscope's ability to measure the smallest magnetic fields and temperature differences with a spatial resolution of just a few 100 nanometers at room temperature. This is crucial for the semiconductor industry as there is currently no method that can achieve this resolution in vertically integrated multichip modules under normal laboratory conditions.
Although temperature measurements with lock-in thermography are already established, conventional methods only achieve a local resolution in the micrometer range. The quantum sensor microscope could open up new possibilities here by correlating high-resolution magnetic field and temperature data and thus offering deeper insights into defective chip modules. Another important aspect is the measurement speed, which is essential for industrial applications: production and fault analysis processes often run according to strict time specifications, which is why only systems that can work at this speed are economically viable.
QuantumDiamonds GmbH is the main project partner and is responsible for integrating diamond-based quantum sensors into a fully integrated microscope. This includes the construction of the test stands, optical calculations for resolution optimization and the development of software for data analysis. The Fraunhofer EMFT team is supporting the design and validation of the microscope in the error analysis of integrated circuits and complex multi-chip modules as well as authentication tests. The scientists check whether the required high resolution and accuracy is achieved and make recommendations for improving hardware and software. The Technical University of Munich (TUM) is responsible for the further development of the required diamond material, in particular for diamond hemispheres and diamond membranes, which are used as central quantum sensors in the microscope. These materials are crucial for achieving the required resolution and must meet high requirements in terms of spin properties for temperature measurements.
The project will result in the prototypical realization of a multimodal system that combines high-resolution temperature and magnetic field measurements.
The project is funded by the Bavarian Joint Research Program (BayVFP) of the State of Bavaria.