ecoFluor project among the finalists of IKU 2017

The aim of the project is to develop an environment-friendly cleaning gas for the semiconductor industry. Now the cooperation partners Fraunhofer EMFT, Solvay Fluor GmbH, Texas Instruments and Muegge GmbH are among the last 15 candidates for the Innovation Award for Climate and Environment 2017.

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ESD: New measuring technologies offer effective protection

Microelectronic devices and systems are getting smaller and more complex – this also presents ESD protection with new challenges. Many established test methods are reaching their limitations. Researchers at Fraunhofer EMFT have developed new solutions that provide more accurate and reproducible measurement results.

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Energy for Smart Objects

Within the project “EnSO” (Energy for Smart Objects), 39 partners from eight countries cooperate to establish new solutions for an intelligent energy supply. The project partners aim to develop so-called AMES (Autonomous Micro Energy Sources). AMES combine several elements like energy harvesting, energy management and micro energy storage systems, ideally allowing for a lifelong operating period.

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Impedimetric CO2-sensor

A research team at Fraunhofer EMFT has developed a CO2 sensor based on an impedimetric measuring principle. The innovation is based on a new type of hybrid sensor layer, a combination of organic and anorganic material. The measurements delivered by the novel sensor show very promising results so far.

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Miniaturized degasser for mobile applications

The scientists at Fraunhofer EMFT have developed a self-sufficient micro degasser, capable of removing gas bubbles and dissolved gas from liquids. The heart of the degasser is a silicon micropump developed at Fraunhofer EMFT.

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Annual event 2018

Biological systems in


March 14, 2018 at Fraunhofer EMFT 


State-of-the-art ESD


March 14 - 16, 2018 at Fraunhofer EMFT


Annual Report 2016


Leti and Fraunhofer

team up to strengthen microelectronics innovation in France and Germany


To reinforce the position of Europe’s semiconductor and electronics industry within global competition, eleven institutes within the Fraunhofer Group for Microelectronics have, together with two institutes within the Leibniz Association, come up with a concept for a cross-location research factory for microelectronics and nanoelectronics.


360° tour

A virtual tour through laboratories and premises of Fraunhofer EMFT.



Fraunhofer EMFT

Hansastraße 27d
80686 Munich
Phone +49 89 54759-0
Fax +49 89 54759-100