The scientists at Fraunhofer EMFT have developed a self-sufficient micro degasser, capable of removing gas bubbles and dissolved gas from liquids. The heart of the degasser is a silicon micropump developed at Fraunhofer EMFT.
Edwards and Fraunhofer cooperate for "the 4th industrial revolution"
The high-performance centre "Secure connected Systems" in Munich and the vacuum pump manufacturer Edwards are going to cooperate in the area of smart manufacturing. The focus is on the realization of predictive and smart maintenance in the specific application of semiconductor production.