Lab for the characterization of MEMS ultrasonic transducers

Measurement environment for the characterization of MEMS ultrasonic transducers
© Fraunhofer EMFT/ Puneet Sansare
Measurement environment for the characterization of MEMS ultrasonic transducers

Fraunhofer EMFT offers professional testing and characterization capabilities to manufacturers of MEMS ultrasonic transducers. These transducers generate and receive ultrasonic waves for precise sensing and actuation in areas such as medical imaging, environmental monitoring and gesture recognition. Characterization is critical for quality assurance, performance evaluation and design optimization to ensure that the transducers meet the requirements of their applications.

Technology offering

The Fraunhofer EMFT lab is equipped with technical infrastructure and facilities to carry out the characterization and measurements of ultrasonic systems with operating frequencies of 0.1 - 20 MHz and distances of less than 50 cm.

The measurements in the Fraunhofer EMFT lab include:

Measurement Details
Measurement of the acoustic field in XYZ (3D mapping)   Actuator as transmitter 
Acoustic field during phase shift of multi-channel actuators
  • In water/silicone oil: Hydrophone (0.1 - 20 MHz)
  • In air: Microphone (0.05 - 2 MHz)
Reception power/sensitivity of the acoustic field  Actuator as receiver
Destructive test Maximum acoustic field and voltage before destruction
Impedance measurement With VNA and determination of the equivalent electrical model of the actuators 

The system to be characterized can be tested in air, non-conductive silicone oil or, hermetically sealed, in deionized water. Measurements of systems with operating frequencies below 50 kHz are not possible. Before characterization, information about the operating voltage, the maximum expected acoustic field and the operating medium (water, oil, air) of the system is required.

Technical data

The following equipment is available in the Fraunhofer EMFT lab:

 

  • Hydrophone for measurements in silicone oil (0.1 - 20 MHz)
  • Hydrophone for measurements in water (0.1 - 20 MHz)
  • Reference transducer (0.1 - 20 MHz)
  • Ultrasonic microphone (0.05 - 2 MHz)
  • Signal amplifier (20 dB)
  • DC power analyzer (up to 60 V)
  • 8-channel transmit/receive board for signal generation/reception
  • Oscilloscope
  • Vector network analyzer (900 Hz - 67 GHz)

Bavarian Chip Design Center
Fraunhofer EMFT is partner of the Bavarian Chip-Design-Center
Bayerisches Wirtschaftsministerium
Bayerisches Wirtschaftsministerium
Forschungsfabrik Mikroelektronik Deutschland
Forschungsfabrik Mikroelektronik Deutschland

Would you like to learn more about the characterization of MEMS ultrasonic transducers?

Then get in touch with us!

You could also be interested in:

 

Circuit Design

 

ASICs for Ultrasonic MEMS Devices

 

Bavarian Chip-Design-Center (BCDC)

Chip Design Prototyping Lab

Electronic Components Test Lab

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