Silicon Semiconductor Technologies

The researchers at Fraunhofer EMFT possess long-term experience in the area of silicon semiconductor technologies. The institut has an own CMOS cleanroom for processing silicon wafers and offers a wide portfolio of single processes and process sequences. Non-CMOS-compatible wafers can be processed in a separate MEMS line. Extensive measurement infrastructure is available for characterization of silicon wafers. Development of highly sensitive low-noise semiconductor components for detection of low level signals, adaptable for application-specific requirements, is a core competence of Fraunhofer EMFT.