Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT
Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT

Micropumps

The world's smallest pump

Fraunhofer EMFT is a driver of innovation in micropump technology and has invented the world’s smallest pump. This expertise in nanoliter-precise dosing opens doors to a wide range of applications. The portfolio includes highly miniaturized silicon, stainless steel, and titanium micropumps as well as dosing system solutions. Our patented manufacturing technology enables an exceptionally high compression ratio of the micropumps. As a result, a high gas back pressure is achieved, ensuring improved bubble tolerance and reliable self-priming – even under demanding operating conditions. The range of applications extends from medical technology and industrial applications to consumer electronics.

Our offer:

  • Contract development: Customized solutions perfectly aligned with your needs.
  • Technology transfer: Direct access to the latest research results and their implementation in industrial applications.
  • IP Licensing: Leveraging patented technologies to enhance your competitive advantage.
  • Funded Projects: Joint participation in publicly funded research projects – both nationally and internationally.

Our interdisciplinary research team supports partners from the initial idea to market-ready solutions. Our strength lies in combining scientific excellence with practical implementation. Let’s shape the future together.

Fraunhofer EMFT has pioneered the development of the world's smallest pump, underscoring its expertise in the field of micropump technology. The institute specializes in the nanoliter-precise dosing of gases and liquids, a crucial competence that spans a wide array of applications. Their portfolio boasts an impressive array of highly miniaturized micropumps made from silicon, stainless steel, and titanium, as well as comprehensive dosing system solutions. These innovations find applications in fields ranging from medical technology to industrial applications and consumer electronics.

 

© Fraunhofer EMFT | Bernd Müller

Piezoelectric Micropumps

Piezoelectric micro pumps are key components of micro dosing systems. Fraunhofer EMFT offers application-specific solutions with a broad portfolio of silicon, stainless steel and titanium micro pumps. One highlight is the world's smallest silicon micro pump, measuring just 3.5 × 3.5 × 0.6 mm³.

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© Fraunhofer EMFT | Bernd Müller

Drug Dosing Systems

Micro membrane pumps enable precise and safe drug dosing, making them ideal for use in medical dosing systems. Fraunhofer EMFT's micro pumps meet the highest safety and reliability standards: they flush out blocked catheters and prevent dosing errors thanks to self-closing valves.

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© Fraunhofer EMFT | Bernd Müller

Implantable Micropumps

The implantable micropumps developed by Fraunhofer EMFT deliver drugs and hormones with pinpoint accuracy – for example, in pain management or insulin therapy. They can also move body fluids, for example in the treatment of glaucoma, and function as small pneumatic or hydraulic drives.

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© Fraunhofer EMFT | Bernd Müller

Fluid Control for Environmental Sensors

Micropumps improve gas sensor systems in many ways: they ensure fast air supply, precise calibration, support regeneration and enable accurate gas determination thanks to AI. With innovative technologies such as preconcentrators, they enable precise measurements down to the ppb range and overcome pressure drops in filter systems.

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© Fraunhofer EMFT | Bernd Müller

Micro Dosing Feedback Control

Fraunhofer EMFT develops innovative solutions for monitoring microdosing of gases and liquids. Sensory and differential pressure-based measurement methods enable controlled dosing regardless of environmental conditions such as pressure, temperature and humidity.

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© Fraunhofer EMFT | Bernd Müller

Design and Development of Micro Dosing Systems

The design and development of microdosing systems requires interdisciplinary knowledge, such as fluid mechanics, electrical engineering and chemistry. To further improve performance and reliability, our researchers are constantly developing new solutions – for example, for fluid management, dosing monitoring and chemical resistance.

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© Fraunhofer EMFT | Bernd Müller

Micropump with self-sensing technology

The Fraunhofer EMFT team has developed an innovative micropump with integrated self-sensing technology: thanks to the piezo effect and AI, it monitors its own status, ensuring maximum dosing accuracy and reliability.

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