Micropumps

Piezoelectric micro pumps are key components of micro dosing systems. Fraunhofer EMFT offers application-specific solutions with a broad portfolio of silicon, stainless steel and titanium micro pumps. One highlight is the world's smallest silicon micro pump, measuring just 3.5 × 3.5 × 0.6 mm³.

Micro membrane pumps enable precise and safe drug dosing, making them ideal for use in medical dosing systems. Fraunhofer EMFT's micro pumps meet the highest safety and reliability standards: they flush out blocked catheters and prevent dosing errors thanks to self-closing valves.

The implantable micropumps developed by Fraunhofer EMFT deliver drugs and hormones with pinpoint accuracy – for example, in pain management or insulin therapy. They can also move body fluids, for example in the treatment of glaucoma, and function as small pneumatic or hydraulic drives.

Micropumps improve gas sensor systems in many ways: they ensure fast air supply, precise calibration, support regeneration and enable accurate gas determination thanks to AI. With innovative technologies such as preconcentrators, they enable precise measurements down to the ppb range and overcome pressure drops in filter systems.

Fraunhofer EMFT develops innovative solutions for monitoring microdosing of gases and liquids. Sensory and differential pressure-based measurement methods enable controlled dosing regardless of environmental conditions such as pressure, temperature and humidity.

The design and development of microdosing systems requires interdisciplinary knowledge, such as fluid mechanics, electrical engineering and chemistry. To further improve performance and reliability, our researchers are constantly developing new solutions – for example, for fluid management, dosing monitoring and chemical resistance.

The Fraunhofer EMFT team has developed an innovative micropump with integrated self-sensing technology: thanks to the piezo effect and AI, it monitors its own status, ensuring maximum dosing accuracy and reliability.