Piezo Micropumps for Application-Specific Micro Dosing Solutions

Piezoelectrically driven micromembrane pumps are the beating heart of microdispensing systems. The Fraunhofer EMFT team has extensive knowledge and practical experience in the design of piezo micropumps. On this basis, the technological parameters in terms of dosing accuracy, backpressure rigidity, size, energy consumption, particle resistance, bubble tolerance and "free flow" protection can be adapted to the specific requirements of the application.

Fraunhofer EMFT has a portfolio of piezo micropumps made of silicon, stainless steel or titanium, designed for different applications. One of the main focuses of R&D activities in the field of silicon micropumps is their further miniaturization. The aim is to significantly reduce manufacturing costs as a result and thus facilitate access to mass markets. Currently measuring 3.5 x 3.5 x 0.6 mm3 , the world's smallest silicon micromembrane pump was developed at Fraunhofer EMFT. 

Piezoelectrically driven stainless steel micromembrane pumps developed at the institute, for example, enable precise dosing rates of up to 200 ml/min with air and up to 80 ml/min with water. The field of application of the micropump in the medical technology sector ranges from infusion and drug dosing systems to local negative pressure therapies for the treatment of chronic wounds. 

High flow rates or extreme miniaturization - with its extensive pump portfolio, Fraunhofer EMFT can meet a wide range of requirements in various fields of application.

These competences in the area of piezo micropumps are available at Fraunhofer EMFT for your application topics. We look forward to hearing from you!