
Hardware Security
High precision 5-axis-CNC-milling with integrated sensor for layer thickness |
|
Infared (IR) laser system |
|
"IntlVac Nanoquest I" ion beam etching system for homogeneous and high precision processing and ablation of single IC metall layers |
|
"Raith 150 Two" scanning electron microscope (SEM) for chip scanning |
|
"Raith Velion" dual-beam FIB/SEM system for precise processing and modification of IC's |
|
Further equipment for processing and process control |
|