From Research to Application: Projects at Fraunhofer EMFT

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  • PECVD cleaning plasma with environmentally friendly and CFC-free "Solvaclean®N" fluorine chemistry
    © Fraunhofer EMFT/ Bernd Müller

    PECVD cleaning plasma with environmentally friendly and CFC-free "Solvaclean®N" fluorine chemistry

    Many plasma coating systems used in the semiconductor industry have to undergo thorough cleaning on a regular basis after each stage of production. Currently this is mainly carried out using perfluorinated compounds (PFCs) and nitrogen trifluoride (NF3) gases, which are up to 17,000 times as damaging to the environment and climate as the greenhouse gas CO2. Solvay, Texas Instruments, Muegge and Fraunhofer EMFT are working on the project ecoFluor to develop an environment-friendly alternative which only has the greenhouse potential of CO2: the gas mixture used by the cooperation partners – Solvaclean®, consisting of fluorine, nitrogen and argon – dispenses entirely with the highly environmentally harmful gases PFCs and NF3.

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  • © Unsplash / M. Spiske

    Whether electric car or photovoltaic system - intelligent battery systems and storage units are key enablers for sustainable technologies. In the HealthBatt research project, Fraunhofer EMFT researchers are working with partners on a multi-sensor approach to holistically record and evaluate load profiles in battery storage systems. The combination of failure analyses and AI-supported data evaluation is intended to extend the service life of battery systems and increase safety of use in the event of overload.

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  • © Fraunhofer EMFT

    The Mobile Learning Hub - shown here in a seminar room of the ZVE - enables practical training also remotely. Like a mobile booth, it can be easily transported on wheels.

    With the Soldering Mobile, the Center for Interconnection Technology in Electronics ZVE at Fraunhofer EMFT is now offering its customers an attractive alternative to onsite training courses at the Oberpfaffenhofen training center. The soldering station on wheels can be put into operation directly at the customer's premises using plug & play.

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  • Chip Self-Assembly
    © Fraunhofer EMFT /Bernd Müller

    Chip Self-Assembly

    Europe, and Germany in particular, have outstanding strengths in microelectronics for automotive, energy, security and industrial applications. In the EU project EuroPAT-MASIP, partners from nine countries are bundling their know-how to lay strategic foundations for the development of innovative and complex electronic systems. This is intended to secure and significantly increase the competitiveness of Europe's microelectronics industry in a global comparison.

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  • Ultrasound-based proximity sensors
    © Fraunhofer EMFT/ Bernd Müller

    Measurement setup for an eight-channel ultrasonic transceiver chip

    Intelligent interactive systems for human-machine interaction (MMI) are increasingly being used in many applications in the areas of Industry 4.0, Smart Health, Smart Security and Automotive. Here, sensor systems for non-verbal information exchange in the near-distance and contact range are essential for both functionality and security. In order to meet the increasing demands in terms of performance, energy efficiency and functionality, researchers at Fraunhofer EMFT are working together with three other Fraunhofer institutes to develop a modularized MEMS technology and sensor platform.

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  • Thermally assisted chemical vapor deposition on 8-inch wafers.
    © Fraunhofer EMFT/ Bernd Müller

    Thermally assisted chemical vapor deposition on 8-inch wafers.

    Nature sets a high bar: Our brain is capable of processing and storing huge amounts of information without using more energy than a 20-watt light bulb. This is a good reason for researchers worldwide to take the human brain as a model for circuits in so-called neuromorphic chips. Within the EU project NeurONN, a Fraunhofer EMFT research team is working with six European partners on extremely energy-efficient elements and architectures for neuromorphic computing. Innovative 2D materials are also being used in the process.

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  • PFAS Reduction in Semiconductor Manufacturing

    Lower Greenhouse Gas Emissions from the Semiconductor Industry

    © Fraunhofer EMFT/ Bernd Müller

    Silizium-Wafer mit Aluminium-Qubit-Chips - Nahaufnahme

    An advanced abatement system and exhaust gas cleaning solutions capture and reduce PFAS, NF3, and SF6 emissions in semiconductor manufacturing.

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  • Senspflast demonstrator

    Senspflast demonstrator

    Diabetes is one of the most prevalent diseases of civilization. Around 15-25% of patients develop diabetic foot syndrome during the progression of the disease: nerve damage and circulatory disorders, particularly in the feet. As those affected have a reduced or no sensation of pain in their feet, pressure points, blisters or cuts often form unnoticed, which can result in an open ulcer if not treated in time. In future, a patch with integrated sensor technology should help to detect critical conditions and the need for treatment at an early stage.

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  • Sensor solutions for monitoring the health of newborn babies
    © Unsplash/ Picsea

    One of the aims of the NEWLIFE project is to constantly keep an eye on the health and well-being of newborn babies

    A birth is a miracle of nature - but also a highly vulnerable stage in the lives of mother and baby. In the EU project Newlife, researchers from 6 European countries are jointly working on innovative sensor-based monitoring solutions to ensure the well-being of mother and child during pregnancy as well as during and after birth. The aim is to digitally revolutionize paediatric and childbirth care.

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  • © Fraunhofer EMFT/ Bernd Müller

    Continuous roll-to-roll processing of electronic foils

    In the EU project SusFe, Fraunhofer EMFT is working with European partners to develop an efficient and resource-saving design and production platform for medical devices. The aim is to meet both the growing demand for medical devices as well as the aspect of sustainability.

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