Novel inductively coupled plasma array with decoupled INCA plasma source.
Approximately 80 % of the CO2 footprint of average electronic components is created already during their production. A Fraunhofer EMFT research team is working on optimizing semiconductor manufacturing processes in order to minimize the use of climate-damaging process gases. In this context, the scientists are also testing more climate-friendly alternatives to etching gases used as standard today.
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